DTA

Digital Theses Archive

 

Tesi etd-08142020-175726

Type of thesis
Master univ. I liv.
Author
COLANTONIO, MATTEO
URN
etd-08142020-175726
Title
Beamforming in nanophotonic membrane integrated circuit for free-space sensing and metrology
Structure
Istituto di Tecnologie della Comunicazione, dell'Informazione e della Percezione
Course
Corsi Alta Formazione - PHOTONIC INTEGRATED CIRCUITS, SENSORS AND NETWORKS (PIXNET)
Committee
relatore CASTOLDI, PIERO
Relatore POGORETSKIY, VADIM
Relatore JIAO, YUQING
Keywords
  • alignment
  • metamaterial
  • optical antennas
  • optical metrology
  • sub-wavelength gratings
Exam session start date
;
Availability
completa
Abstract
Abstract—Optical wafer metrology for semiconductor devices<br>manufacturing relies on laser-based phase-grating sensors to<br>measure the alignment of the wafer to the lithography system.<br>This sensor can guarantee sub-nanometer accuracy but lacks<br>the ability to measure multiple wafer locations at the same<br>time. Here, a first effort was made to provide a solution that<br>can map the wafer grid in a single step, thus increasing the<br>throughput, by employing photonic integrated circuits. The main<br>focus of this work was on developing optical integrated antennas<br>as a key enabling device of such circuits. Analytic model and<br>simulation results of antennas based on sub-wavelength gratings<br>showed the possibility to produce beam widths from 6° to 0.1°<br>and arbitrary sidelobe ratios along one direction in a single<br>lithography step. The beam shape in the orthogonal direction<br>was controlled through a phased array of these antennas. These<br>results indicate that there is a possibility of building alignment<br>sensors based on the simulated antennas, such as the circuits<br>proposed at the end of this article.
Files